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Blade breakage sensor
Processing is stopped immediately if blade breakage occurs to minimize potential workpiece damage.
CC Filter Unit
Unique filter design for low filtration running costs
Designed for use next to a dicing saw Ultra-small footprint filtration system
This unit recycles dicing/grinding water and ...
CO 2 Injector
High quality processing through direct link to dicing saw
Workpiece charging significantly reduced
The CO2 Injector lowers the resistivity of purified water by dissolving carbon ...
DCS1440
Manual cleaning system for Φ8-inch wafers with enhanced cleaning performance
The DCS1440 is used to clean workpieces that have been cut on a dicing saw. Cleaning sequences can be created easily (the ...
DCS1441
Spin cleaning and drying for workpieces processed using dicing saws
Manual cleaning system with enhanced cleaning performance
The DCS1441 is the optimal solution for cleaning and ...
DCS1460
Manual cleaning system for Φ300 mm wafers with enhanced cleaning performance
The DCS1460 is used to clean workpieces that have been cut on a dicing saw. Cleaning sequences can be created easily (the ...
DTU1550
Next generation water temperature control unit which has improved cooling efficiency and water supply capacity
Stable High Precision Processing
DTU1550 is a water supply unit for ...
DTU162
Higher Dicing quality with lower environmental impact
Support for dicing quality
The DTU162 keeps both spindle cooling water and cutting water at a constant temperature and suitable ...
DWR1720
Deionized Water Recycling Unit
A super-compact deionized water recycling unit for advanced environmental performance
• Integrates deionized water ...
DWR1722
Ultracompact DI water recycling unit with extraordinary energy and water conservation
Numerous functions, ultra compact
The DWR1722 is a DI water recycling unit for dicing saws ...
ICROS™ Tape
“ICROS™ Tape has been the world's top protective tape used in semiconductor wafer backgrinding (BG) for many decades. In order to meet the strict requirements of the semiconductor market, we optimize the whole ...
Non contact setup
Blade tip position relative to the chuck table surface is detected by an optical sensor. Processing quality is stable since the blade wear can be measured at any time during processing.
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- +63 908 887 4217
- +63 998 961 9440
- info@aurotech.com
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