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StayClean-F

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Prevents pad corrosion during dicing

Pad corrosion prevention
For workpieces that have a long cut time, such as a workpiece with a small die size and a large diameter, corrosion may occur on the bonding pad due to prolonged exposure to the cutting water. By using StayClean-F, it prevents corrosion due to the formation of an ultra-thin barrier layer on the surface of the workpiece.

Product Classification

 

 

 

Particle adhesion prevention

By using the additive agent StayClean-F, it separates particles from the workpiece surface and prevents adhesion of particles that can not be removed with the spinner wash after dicing.

 

 

Low environmental load/Low running cost

StayClean-F can be used in the same environment* as normal dicing and does not include any regulated chemicals, such as substances covered under the RoHS directive or PFOS. Furthermore, since StayClean-F can be used even at diluted concentrations of one part per thousand, and in particular at one part per ten thousand to prevent corrosion, the running costs are low.
*If the cutting water is being recirculated, contact your DISCO sales representative.

 

 

Mechanism

  1. [1]  The components of StayClean-F form a barrier layer on the workpiece and this prevents pad corrosion and particle adhesion.
  2. [2]  The components of StayClean-F are removed in the spinner wash process.

 

 


The use of StayClean-F has no effect on the process results

When StayClean-F is added to the cutting water, the processing results are the same as for deionized water.

 

Workpiece Si wafer
Blade NBC-ZH
Spindle rpm 40,000 (min-1)
Feed speed 60 mm/s

 

 



StayClean Injector

Using the injector developed exclusively for StayClean, stable supply is possible even at concentrations more dilute than one part per thousand.

 

 


Specifications


Cautions before using StayClean-F

  • Make sure to read the SDS before using StayClean-F because it describes detailed care regarding its use.
  • Do not use StayClean-F for any unintended use.


Cautions regarding the use of StayClean-F

  • Take care not to touch your eyes or skin, wear appropriate protective equipment such as gloves and glasses when handling it.
  • Avoid using it in conjunction with other chemical agents (in particular strong acids or strong alkalines).


Cautions regarding StayClean-F storage

  • Avoid exposure to direct sunlight and store in a cool dark place. Do not place it in a freezer.
  • Seal the container properly and then store it.
  • With the container still sealed, the warranty period is one year from the date of manufacture.

 

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