Lineup of two types according to application

Lineup of two types according to application

Gettering DP wheels are offered in two types according to the application. In contrast to the standard GA-type, the MZ-type is a DP wheel which increases the die strength of the polished wafer, allowing for an even thinner finish. However, the MZ-type requires detailed polishing condition selection according to the workpiece. Please contact us if you wish to use the MZ-type.
 

Experimental Data

Die Strength Comparison (3-point bending)

* Finish thickness:　25 µm Process:　DBG （Dicing Before Grinding）

Gettering Effect

The amount of precipitated Cu detected on the polished surface of a mirror wafer exceeds 1.0 E11 after a copper solution is applied to the surface. In contrast, the amount of precipitated Cu detected on the backside of a wafer polished with a Gettering DP is below the detection limit, thus indicating that the surface had a gettering effect.

TXRF measurement data before and after Cu solution application (Φ8 inch mirror wafer)

To quantitatively measure the gettering effect, samples were contaminated with a Cu solution. The Cu was diffused at 350 ºC for 3 hours and then analyzed using TXRF (Total-Reflection X-ray Fluorescence). Take a Gettering DP polished wafer for example; the amount of Cu detected on the opposite surface (mirror surface) is analyzed with TXRF after diffusing the Cu on the polished surface and contaminating with Cu.

※ Detectable range at below 0.5E10 atoms/cm²

Specification:

Precision Processing Tools Process Correlation Chart and Trouble Support

When ordering
Please contact a DISCO representative with your product needs such as type, wheel size, and quantity.
When you place the first order with us, please explain application information such as materials to grind, sizes, machine, type, and other specification.
We are ready to help you to determine which is our most appropriate product type for your application.
* Due to improvements in our products, it is possible that product specifications may be changed without advanced notice.
Please confirm the product specifications with a DISCO representative.

To use these DISCO blades and wheels (hereafter precision tooling) safely...
Please read carefully and follow the instructions below to prevent any accidents or injuries:

• USE a safety cover (nozzle case, cover), equipped as a standard accessory, to avoid injury.
• DO NOT EXCEED the specified rpm limit indicated on the precision tooling.
• FOLLOW the instruction manual of the equipment to mount the precision tooling properly.
• DO NOT DROP OR HIT the precision tooling. This may cause breakage or injury.
• Always CHECK the precision tooling for chipping or any other damage before starting to use it. DO NOT USE the tooling if there is any damage.
• READ the operation manual of the cutting/grinding equipment before use.
• DO NOT USE the precision tooling with modified or customized equipment.
• DO NOT USE precision tooling that has a different size from the one recommended for your equipment.
• DO NOT USE the precision tooling for any other purpose than grinding, cutting, or polishing.
• Always USE water or coolant to prevent precision tooling damage.